ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,384,673, issued on Aug. 12, was assigned to AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) Co. LTD. (Shenzhen, China).
"Method for manufacturing MEMS device and MEMS device" was invented by Ping-He Chang (Hsinchu, China) and Kahkeen Lai (Singapore).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing a MEMS device and the MEMS device are provided. The method includes: depositing a film on at least a part of a surface of a sacrificial layer, defining at least one through hole in the thin film by machining, removing at least a part of a material covered by the thin film in the sacrificial layer, discharging the part of the material removed from ...