ALEXANDRIA, Va., June 6 -- United States Patent no. 12,281,007, issued on April 22, was assigned to AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) Co. LTD. (Shenzhen, China).
"MEMS microphone" was invented by Zhengyu Shi (Shenzhen, China), Linlin Wang (Shenzhen, China) and Rui Zhang (Shenzhen, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a MEMS microphone including a substrate with a back cavity and a capacitive system disposed on the substrate. The capacitive system includes a back plate and a vibration diaphragm arranged opposite to the back plate. The back plate includes a middle part and a fixed part surrounding the middle part and fixed to the substrate. The fixed part is ar...