US Patent Issued to 6K on March 25 for "Microwave plasma apparatus and methods for processing materials using an interior liner" (Massachusetts, New Hampshire Inventors)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,261,023, issued on March 25, was assigned to 6K Inc. (North Andover, Mass.).

"Microwave plasma apparatus and methods for processing materials using an interior liner" was invented by Richard K. Holman (Wellesley, Mass.) and Saurabh Ullal (Hollis, N.H.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The embodiments disclosed herein are directed to systems, methods, and devices for processing a material using a microwave plasma apparatus with an interior liner. In some embodiments, the liner comprises a reduction resistant material layer in direct contact with a hydrogen-containing plasma of a plasma processing apparatus. In some embodiments, the liner ma...