ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,412,733, issued on Sept. 9.
"Electrode array" was invented by Gary Proudfoot (Ardington, Great Britain), Gareth Waters (Bassaleg, Great Britain), Annika Peter (Abingdon, Great Britain), Mike Cooke (Bristol, Great Britain) and Aileen O'Mahony (Abingdon, Great Britain).
According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma generation electrode array for a plasma processing tool is described. The plasma processing tool comprises a processing chamber and a substrate table therein for supporting a substrate in use on which material is to be deposited and/or etched. The electrode array comprises a plurality of ground electrodes and at least one live electrod...