ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,422,307, issued on Sept. 23.
"MEMS thermal sensor array" was invented by Matthew A. Hertel (Washington).
According to the abstract* released by the U.S. Patent & Trademark Office: "A novel high temperature thermal sensing method and device is disclosed that can employ a dual-sensing platinum resistor encased in a mono-crystalline alpha-alumina (sapphire) substrate. The device can comprise four platinum trace elements, oriented with 90deg rotational symmetry atop a 1120 oriented crystal lattice substrate. The resistance temperature detectors (RTD) temperature measurement calibration can then be monitored for drift and corrected by comparing the differential strain-derived measurement...