ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,436,457, issued on Oct. 7.
"Developing apparatus and substrate processing apparatus" was invented by Giwoong Nam (Incheon, South Korea), Jin Kwak (Chungcheongnam-do, South Korea), Jaeseung Lee (Seoul, South Korea), Taekyu Choi (Incheon, South Korea), Inho Son (Incheon, South Korea), Sanghyun Park (Gyeongsangnam-do, South Korea) and Yeongwon Kang (Gyeonggi-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present application relates to a developing apparatus. The developing apparatus comprises a housing; a wafer support disposed within the housing and for holding a wafer; a semipermeable diaphragm disposed within the housing and separatin...