ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,454,424, issued on Oct. 28.
"Substrate transport system" was invented by Go Yamaguchi (Fukuoka, Japan), Yoshiaki Kubota (Fukuoka, Japan) and Kensuke Oni (Fukuoka, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate transport system comprises: a linear transport device configured to transport a substrate along a transport line; and a robot configured to receive the substrate from the linear transport device, load the substrate into a processing unit, unload the substrate from the processing unit, and deliver the substrate to the linear transport device, wherein the linear transport device comprises: a first moving body configured to move alo...