ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,476,128, issued on Nov. 18.
"Wafer storage container" was invented by Bum Je Woo (Seongnam-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed is a wafer storage container that is connected to a wafer transfer chamber of an EFEM and supplies a purge gas to wafers to remove fumes from the wafers or to control humidity of the wafers. More particularly, proposed is a wafer storage container that effectively blocks an external gas from flowing into a storage chamber, while effectively achieving fume removal and humidity control for wafers."
The patent was filed on July 11, 2023, under Application No. 18/350,546.
*For further informatio...