ALEXANDRIA, Va., June 17 -- United States Patent no. 12,313,676, issued on May 27.
"Planarity control for load pull tuner on wafer" was invented by Christos Tsironis (Kirkland, Canada).
According to the abstract* released by the U.S. Patent & Trademark Office: "Planarity adjustment of RF microprobes in a load pull setup on wafer, using a low-profile impedance tuner that is mounted on a 3-axis tuner positioner at an angle matching approximately the angle of the wafer probe, is performed using a wedge-shaped interface block and a gimbal linking the vertical axis of the 3-axis tuner positioner with the tuner body. The gimbal is required when the axis of the slabline is not aligned with the tips of the RF microprobes, in which case the tuner ...