ALEXANDRIA, Va., June 25 -- United States Patent no. 12,340,993, issued on June 24.
"Non-invasive diagnostic method and apparatus for plasma processes" was invented by Shinjae You (Daejeon, South Korea), Sangho Lee (Seoul, South Korea), Sijun Kim (Daejeon, South Korea), Jangjae Lee (Daejeon, South Korea), Yeongseok Lee (Jeju-si, South Korea) and Junghyeng Kim (Daejeon, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed are non-invasive diagnostic method and apparatus for plasma processes in which plasma processes can be monitored in real time by measuring a surface wave resonance frequency generated in plasma or a sheath on the basis of a surface wave resonance principle. The diagnostic meth...