ALEXANDRIA, Va., June 6 -- United States Patent no. 12,281,992, issued on April 22.
"Systems and methods for voltage contrast imaging using photoreflectance microscopy" was invented by William W. Chism II (Austin, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "An optical technique for voltage contrast imaging of the active electronic properties of semiconductors, including semiconductor surfaces, periodic structures, and electrically active defects, is disclosed. A pump laser beam is used to produce a modulated photovoltage in a semiconductor sample and a second probe laser beam is used to detect synchronous changes in the reflectance of the sample, resulting in a non-contact voltage contrast imaging c...