INTERNATIONAL PATENT: VEECO INSTRUMENTS INC. FILES APPLICATION FOR "UV ASSISTED STRIP (UVAS) OF PHOTORESIST TO REALIZE ESG AND 3D INTEGRATION TARGETS"

GENEVA, Oct. 28 -- VEECO INSTRUMENTS INC. (1 Terminal DrivePlainview, New York 11803) filed a patent application (PCT/US2025/025354) for "UV ASSISTED STRIP (UVAS) OF PHOTORESIST TO REALIZE ESG AND 3D INTEGRATION TARGETS" on Apr 18, 2025. With publication no. WO/2025/222113, the details related to the patent application was published on Oct 23, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): TADDEI, John (c/o Veeco Instruments Inc., 1 Terminal DrivePlainview, New York 11803), TYLER, Phillip (c/o Veeco Instruments Inc., 1 Terminal DrivePlainview, New York 11803), VILLA, Matthew (c/o Veeco Inst...