GENEVA, Feb. 12 -- VEECO INSTRUMENTS INC. (One Terminal DrivePlainview, New York 11803) filed a patent application (PCT/US2024/040041) for "PLASMA VESSEL CLEANING FOR ION BEAM SYSTEM" on Jul 29, 2024. With publication no. WO/2025/029731, the details related to the patent application was published on Feb 06, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SAGHAYEZHIAN, Mohammad (One Terminal DrivePlainview, New York 11803), RUBIN, Binyamin (One Terminal DrivePlainview, New York 11803)
Abstract:
An in situ cleaning of the vessel of an ion deposition/etching system that includes utilizing th...