INTERNATIONAL PATENT: VEECO INSTRUMENTS INC. FILES APPLICATION FOR "ELECTROSTATIC CHUCK FOR ION BEAM DEPOSITION SYSTEMS"

GENEVA, Sept. 2 -- VEECO INSTRUMENTS INC. (1 Terminal DrivePlainview, New York 11803) filed a patent application (PCT/US2025/016469) for "ELECTROSTATIC CHUCK FOR ION BEAM DEPOSITION SYSTEMS" on Feb 19, 2025. With publication no. WO/2025/178949, the details related to the patent application was published on Aug 28, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CERIO, Frank (1 Terminal DrivePlainview, New York 11803), MEHTA, Rutvik (1 Terminal DrivePlainview, New York 11803)

Abstract: An electrostatic chuck for ion beam deposition systems having an assist beam and that can be operated at ...