GENEVA, April 14 -- VAT HOLDING AG (SeelistrasseCH-9469 Haag) filed a patent application (PCT/EP2024/077824) for "PIN-LIFTER WITH POSITIONING COMPENSATION" on Oct 03, 2024. With publication no. WO/2025/073820, the details related to the patent application was published on Apr 10, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): KUHNE, Clemens (Kirchplatz 57317 Valens), ROBUSTELLI, Fabio (Buchserstrasse 109469 Haag), WONG, Bruno (Aeulistrasse 3A9470 Buchs)
Abstract:
Pin lifting device (10) configured for moving and positioning a substrate (1) to be processed in a process atmosphere region (...