GENEVA, Oct. 27 -- VAT HOLDING AG (SeelistrasseCH-9469 Haag) filed a patent application (PCT/EP2025/060405) for "GAS INLET VALVE WITH IMPROVED FLOW GEOMETRY" on Apr 15, 2025. With publication no. WO/2025/219404, the details related to the patent application was published on Oct 23, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): EHRNE, Florian (Halde 39467 Frumsen), TISCHHAUSER, Tobias (Rheinstrasse 397320 Sargans), HARDEGGER, Raphael (Laui 289466 Sennwald)
Abstract: The invention relates to a gas inlet valve (1) for the controlled inlet of a fluid into a vacuum process chamber, wherein the...