GENEVA, July 1 -- VAT HOLDING AG (SeelistrasseCH-9469 Haag) filed a patent application (PCT/EP2024/087336) for "GAS INLET VALVE AND ADJUSTMENT ELEMENT FOR THE GAS INLET VALVE" on Dec 19, 2024. With publication no. WO/2025/132741, the details related to the patent application was published on Jun 26, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): EHRNE, Florian (Halde 39467 Frumsen), BACHMANN, Christof (Wasenstrasse 19466 Sennwald)
Abstract:
The invention relates to a gas inlet valve (1) for the controlled admittance of a fluid into a vacuum process chamber, wherein the gas inlet valve (1...