INTERNATIONAL PATENT: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE FILES APPLICATION FOR "APPARATUS FOR GENERATING EUV RADIATION AND METHOD"

GENEVA, Nov. 3 -- TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE (Johann-Maus-Strasse 271254 Ditzingen) filed a patent application (PCT/EP2025/058051) for "APPARATUS FOR GENERATING EUV RADIATION, AND METHOD" on Mar 25, 2025. With publication no. WO/2025/223768, the details related to the patent application was published on Oct 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): REGAARD, Boris (Haenflingweg 870499 Stuttgart)

Abstract: The invention relates to an apparatus (10) for generating EUV radiation. The apparatus (10) has a vacuum chamber (12) in which a target material (22) f...