INTERNATIONAL PATENT: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE, ASML NETHERLANDS B.V. FILES APPLICATION FOR "BEAM GUIDING DEVICE FOR GUIDING LASER RADIATION AND LITHOGRAPHY SYSTEM"

GENEVA, Oct. 18 -- TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE (Johann-Maus-StraBe 271254 Ditzingen), ASML NETHERLANDS B.V. (De Run 65015500 AH Veldhoven) filed a patent application (PCT/EP2025/059616) for "BEAM GUIDING DEVICE FOR GUIDING LASER RADIATION AND LITHOGRAPHY SYSTEM" on Apr 08, 2025. With publication no. WO/2025/215031, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): FROHLICH, Sascha (DieselstraBe 1070469 Stuttgart), SCHILLING, Tom (StockheimerstraBe 670435 Stuttgart), FROHLICH, Benjamin (OrplidstraB...