INTERNATIONAL PATENT: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING AG FILES APPLICATION FOR "EUV DRIVER LASER FOR GENERATING AN EUV LIGHT-EMITTING PLASMA AND METHOD FOR GENERATING AN EXCITATION LIGHT BEAM"

GENEVA, Sept. 16 -- TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING AG (Johann-Maus-StraBe 271254 Ditzingen) filed a patent application (PCT/EP2024/056169) for "EUV DRIVER LASER FOR GENERATING AN EUV LIGHT-EMITTING PLASMA AND METHOD FOR GENERATING AN EXCITATION LIGHT BEAM" on Mar 08, 2024. With publication no. WO/2025/185830, the details related to the patent application was published on Sep 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LERCH, Ajanthkrishna (Burgstr. 1771640 Ludwigsburg), BRUNNE, Jens (Fangelsbachstr. 2670180 Stuttgart), KRAUSS, Guenther (Olgastr. 771088 Holzgerlin...