GENEVA, Aug. 24 -- TRUMPF HUTTINGER GMBH + CO. KG (Botzinger StraBe 8079111 Freiburg) filed a patent application (PCT/EP2025/052938) for "HF GENERATOR FOR A PLASMA PROCESSING SYSTEM, AND SUCH A PLASMA PROCESSING SYSTEM" on Feb 05, 2025. With publication no. WO/2025/172132, the details related to the patent application was published on Aug 21, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MAIER, Florian (Kapellenstrasse 33a79292 Pfaffenweiler)
Abstract:
An HF generator (3) for a plasma processing system (1) comprises an amplifier unit (10) which is designed to amplify an HF signal. Furth...