GENEVA, May 28 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (2400 Grove BoulevardAustin, Texas 78741) filed a patent application (PCT/US2024/054990) for "WAFER SUPPORT FOR MEASURING WAFER GEOMETRY" on Nov 07, 2024. With publication no. WO/2025/106334, the details related to the patent application was published on May 22, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): FULFORD, Daniel (NanoFab 300 South, 255 Fuller Rd.Suite 214Albany, New York 12203), GARDNER, Mark I. (2400 Grove Blvd.Austin, Texas 78741), FULFORD, H. Jim (NanoF...