INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, TOKYO ELECTRON U.S. HOLDINGS, INC. FILES APPLICATION FOR "SYSTEM AND METHOD FOR PROCESS CHEMISTRY ABATEMENT AND RECYCLING"

GENEVA, Feb. 4 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (401 S 1st St, Suite 900Austin, Texas 78704) filed a patent application (PCT/US2025/037968) for "SYSTEM AND METHOD FOR PROCESS CHEMISTRY ABATEMENT AND RECYCLING" on Jul 16, 2025. With publication no. WO/2026/024523, the details related to the patent application was published on Jan 29, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): OTTO, Lauren M. (3455 Lyman Blvd.Chaska, Minnesota 55318-3052)

Abstract: A processing system is provided for capturing and recycling proc...