INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, TOKYO ELECTRON U.S. HOLDINGS, INC. FILES APPLICATION FOR "SUBSTRATE SUPPORT WITH PRINTED HEATER"

GENEVA, July 21 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (2400 Grove BoulevardAustin, Texas 78741) filed a patent application (PCT/US2024/058182) for "SUBSTRATE SUPPORT WITH PRINTED HEATER" on Dec 03, 2024. With publication no. WO/2025/151207, the details related to the patent application was published on Jul 17, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VERBAAS, Melvin (2400 Grove Blvd.Austin, Texas 78741)

Abstract: A substrate support includes a top plate including a dielectric material and an outer dielectric su...