INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, TOKYO ELECTRON U.S. HOLDINGS, INC. FILES APPLICATION FOR "SELECTIVE PASSIVATION OF PHOTORESISTS"

GENEVA, April 21 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (2400 Grove BoulevardAustin, Texas 78741) filed a patent application (PCT/US2024/042499) for "SELECTIVE PASSIVATION OF PHOTORESISTS" on Aug 15, 2024. With publication no. WO/2025/080341, the details related to the patent application was published on Apr 17, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): AGARWAL, Ankur (2400 Grove Blvd.Austin, Texas 78741), CARCASI, Michael (2400 Grove Blvd.Austin, Texas 78741)

Abstract: A method of processing a substrate includes...