INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, TOKYO ELECTRON U.S. HOLDINGS, INC. FILES APPLICATION FOR "PLASMA ADJUSTMENT USING SOURCE-LESS RESONANT STRUCTURE"

GENEVA, Sept. 10 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (2400 Grove BoulevardAustin, Texas 78741) filed a patent application (PCT/US2024/050638) for "PLASMA ADJUSTMENT USING SOURCE-LESS RESONANT STRUCTURE" on Oct 10, 2024. With publication no. WO/2025/183750, the details related to the patent application was published on Sep 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LANE, Barton (2400 Grove Blvd.Austin, Texas 78741), CARROLL, John (2400 Grove Blvd.Austin, Texas 78741), ZHAO, Jianping (2400 Grove Blvd.Austin, Tex...