INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, TOKYO ELECTRON U.S. HOLDINGS, INC. FILES APPLICATION FOR "METHODS OF ESTIMATING LINE WIDTH AND SYSTEMS THEREOF"

GENEVA, June 18 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (2400 Grove BoulevardAustin, Texas 78741) filed a patent application (PCT/US2024/051004) for "METHODS OF ESTIMATING LINE WIDTH AND SYSTEMS THEREOF" on Oct 11, 2024. With publication no. WO/2025/122236, the details related to the patent application was published on Jun 12, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KANG, Hoyoung (NanoFab 300 South 255 Fuller Rd.Suite 214Albany, New York 12203)

Abstract: A method for estimating line width of a patterned layer of...