INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, TOKYO ELECTRON U.S. HOLDINGS, INC. FILES APPLICATION FOR "METHOD AND SYSTEM FOR PLASMA PROCESS"

GENEVA, April 29 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (2400 Grove BoulevardAustin, Texas 78741) filed a patent application (PCT/US2024/042785) for "METHOD AND SYSTEM FOR PLASMA PROCESS" on Aug 16, 2024. With publication no. WO/2025/085150, the details related to the patent application was published on Apr 24, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SOLMAZ, Evrim (2400 Grove Blvd.Austin, Texas 78741), ZHANG, Du (NanoFab 300 South 255 Fuller Rd., Suite 214Albany, New York 12203), LANE, Barton (2400 Grove Blvd.Aust...