INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, TOKYO ELECTRON U.S. HOLDINGS, INC. FILES APPLICATION FOR "CERAMIC HEATER ASSEMBLY WITH INTERNAL AND EXTERNAL HEATING FUNCTIONALITY USEFUL IN THE FABRICATION OF MICROELECTRONIC DEVICES"

GENEVA, Sept. 30 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (401 S 1st St, Suite 900Austin, Texas 78704) filed a patent application (PCT/US2025/012091) for "CERAMIC HEATER ASSEMBLY WITH INTERNAL AND EXTERNAL HEATING FUNCTIONALITY USEFUL IN THE FABRICATION OF MICROELECTRONIC DEVICES" on Jan 17, 2025. With publication no. WO/2025/198701, the details related to the patent application was published on Sep 25, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VERBAAS, Melvin (401 S 1st St, Suite 900Austin, Texas 78704)

Abstract: Th...