INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, TOKYO ELECTRON U.S. HOLDINGS, INC. FILES APPLICATION FOR "APPARATUS FOR PLASMA PROCESSING"

GENEVA, Aug. 19 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (401 S 1st St, Suite 900Austin, Texas 78704) filed a patent application (PCT/US2025/010484) for "APPARATUS FOR PLASMA PROCESSING" on Jan 06, 2025. With publication no. WO/2025/170690, the details related to the patent application was published on Aug 14, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): IWAO, Toshihiko (650 MitsuzawaHosaka-cho, Nirasaki City, Yamanashi 407-0192)

Abstract: An apparatus for plasma processing includes an insulating structure including a...