INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, TOKYO ELECTRON U.S. HOLDINGS, INC. FILES APPLICATION FOR "APPARATUS AND METHOD FOR PLASMA PROCESSING"

GENEVA, Feb. 4 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (2400 Grove BoulevardAustin, Texas 78741) filed a patent application (PCT/US2024/024714) for "APPARATUS AND METHOD FOR PLASMA PROCESSING" on Apr 16, 2024. With publication no. WO/2025/024021, the details related to the patent application was published on Jan 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LANE, Barton (2400 Grove Blvd.Austin, Texas 78741)

Abstract: An apparatus for plasma processing a substrate, where the apparatus includes a plasma processing c...