GENEVA, May 27 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku, Tokyo1076325), 東京エレクトロン株式会社 (東京都港区赤坂五丁目３番１号) filed a patent application (PCT/JP2024/039312) for "POWER SUPPLY SYSTEM, PLASMA PROCESSING DEVICE, AND CONTROL METHOD" on Nov 05, 2024. With publication no. WO/2025/105243, the details related to the patent application was published on May 22, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): KOSAK...