INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, 東京エレクトロン株式会社 FILES APPLICATION FOR "CONDITIONING METHOD AND PLASMA PROCESSING SYSTEM"

GENEVA, May 5 -- TOKYO ELECTRON LIMITED (3-1, Akasaka 5-chome, Minato-ku, Tokyo1076325), 東京エレクトロン株式会社 (東京都港区赤坂五丁目３番１号) filed a patent application (PCT/JP2024/036115) for "CONDITIONING METHOD AND PLASMA PROCESSING SYSTEM" on Oct 09, 2024. With publication no. WO/2025/089073, the details related to the patent application was published on May 01, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): TOBANA, Toshikatsu (c/...