INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, 東京エレクトロン株式会社 FILES APPLICATION FOR "COMPONENT ASSEMBLY USED IN SEMICONDUCTOR MANUFACTURING DEVICE, ELECTRODE PLATE USED IN SUBSTRATE PROCESSING DEVICE, POSITIONING METHOD AND SEMICONDUCTOR MANUFACTURING DEVICE"

GENEVA, Jan. 13 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku, Tokyo1076325), 東京エレクトロン株式会社 (東京都港区赤坂五丁目３番１号) filed a patent application (PCT/JP2025/022735) for "COMPONENT ASSEMBLY USED IN SEMICONDUCTOR MANUFACTURING DEVICE, ELECTRODE PLATE USED IN SUBSTRATE PROCESSING DEVICE, POSITIONING METHOD, AND SEMICONDUCTOR MANUFACTURING DEVICE" on Jun 24, 2025. With publication no. WO/2026/009773, the details related to the patent application was published on Jan 08, 2026.

Notably, the patent application was submitted under the International Patent Classificat...