GENEVA, March 3 -- TOKYO ELECTRON LIMITED (3-1, Akasaka 5-chome, Minato-ku, Tokyo1076325), 東京エレクトロン株式会社 (東京都港区赤坂五丁目3番1号) filed a patent application (PCT/JP2024/028629) for "CHUCK CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING METHOD" on Aug 09, 2024. With publication no. WO/2025/041646, the details related to the patent application was published on Feb 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO)....