INTERNATIONAL PATENT: STICHTING NEDERLANDSE WETENSCHAPPELIJK ONDERZOEK INSTITUTEN, STICHTING VU, RIJKSUNIVERSITEIT GRONINGEN, UNIVERSITEIT VAN AMSTERDAM, ASML NETHERLANDS B.V. FILES APPLICATION FOR "EUV RADIATION GENERATING METHOD"

GENEVA, Dec. 29 -- STICHTING NEDERLANDSE WETENSCHAPPELIJK ONDERZOEK INSTITUTEN (Winthontlaan 23526 KV Utrecht), STICHTING VU (De Boelelaan 11051081 HV Amsterdam), RIJKSUNIVERSITEIT GRONINGEN (P.O. Box 729700 AB Groningen), UNIVERSITEIT VAN AMSTERDAM (Spui 211012 WX Amsterdam), ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/063668) for "EUV RADIATION GENERATING METHOD" on May 19, 2025. With publication no. WO/2025/261688, the details related to the patent application was published on Dec 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): PURVIS, ...