GENEVA, Aug. 18 -- SILTRONIC AG (Einsteinstr. 172 Tower B / Blue Tower81677 Munchen) filed a patent application (PCT/EP2025/050780) for "DEVICE AND METHOD FOR DRYING DISC-SHAPED SUBSTRATES" on Jan 14, 2025. With publication no. WO/2025/168307, the details related to the patent application was published on Aug 14, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): REESKE, Gregor (Chemnitzer Str. 54a09599 Freiberg), KUHNSTETTER, Albert (Brucknerstr. 384489 Burghausen)
Abstract:
Proposed is a device for drying disc-shaped substrates (8), comprising a body (1) having a horizontal main direction ...