INTERNATIONAL PATENT: SEOWOO ELECTRON CO., LTD, 주식회사 서우일렉트론 FILES APPLICATION FOR "ELECTROSTATIC CHUCK VOLTAGE SUPPLY DEVICE AND METHOD CAPABLE OF DETECTING ARC"

GENEVA, April 21 -- SEOWOO ELECTRON CO., LTD (A-1910, Songdomirae-ro 30Yeonsu-guIncheon 21990), 주식회사 서우일렉트론 (인천광역시연수구송도미래로 30, A-1910) filed a patent application (PCT/KR2024/096283) for "ELECTROSTATIC CHUCK VOLTAGE SUPPLY DEVICE AND METHOD CAPABLE OF DETECTING ARC" on Oct 10, 2024. With publication no. WO/2025/080086, the details related to the patent application was published on Apr 17, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s)...