GENEVA, Aug. 18 -- ROBERT BOSCH GMBH (Postfach 30 02 2070442 Stuttgart) filed a patent application (PCT/EP2024/084770) for "METHOD FOR PRODUCING AND HANDLING MEMS CHIPS" on Dec 05, 2024. With publication no. WO/2025/168242, the details related to the patent application was published on Aug 14, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): PINTER, Stefan (Bellinostr. 27/172764 Reutlingen)
Abstract:
The invention relates to a method for producing and handling MEMS chips (120) having MEMS structures (122) extending substantially over the entire top surface thereof. In the method, at least ...