GENEVA, Aug. 18 -- ROBERT BOSCH GMBH (Postfach 30 02 2070442 Stuttgart) filed a patent application (PCT/EP2025/051359) for "METHOD FOR HANDLING MEMS CHIPS" on Jan 21, 2025. With publication no. WO/2025/168326, the details related to the patent application was published on Aug 14, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): PINTER, Stefan (Bellinostr. 27/172764 Reutlingen)
Abstract:
The invention relates to a method for handling MEMS chips (120) having MEMS structures (122), in particular sensitive MEMS structures (122), which are arranged on a top surface (174) of the MEMS chips (120)...