GENEVA, May 12 -- ROBERT BOSCH GMBH (WernerstraBe 5170469 Stuttgart), CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2024/080098) for "METHOD FOR CONTROLLING THE TEMPERATURE OF MEMS MICROMIRRORS" on Oct 24, 2024. With publication no. WO/2025/093416, the details related to the patent application was published on May 08, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): LIU, Wenqing (Begonienstrasse 3071263 Weil der Stadt), NOLTEMEYER, Ralf (Wengertweg 1971083 Herrenberg)
Abstract:
The invention relates to a method for controlling the temperature ...