INTERNATIONAL PATENT: RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY, 성균관대학교 산학협력단 FILES APPLICATION FOR "APPARATUS AND METHOD FOR CONTROLLING ETCH SELECTIVITY AND DAMAGE IN EUV PR/SION PATTERN USING GRID PULSING TECHNIQUE"

GENEVA, Jan. 6 -- RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY ((Cheoncheon-dong, Sungkyunkwan University) 2066 Seobu-roJangan-gu, Suwon-siGyeonggi-do 16419), 성균관대학교 산학협력단 (경기도수원시 장안구서부로 2066 (천천동, 성균관대학교)) filed a patent application (PCT/KR2025/008468) for "APPARATUS AND METHOD FOR CONTROLLING ETCH SELECTIVITY AND DAMAGE IN EUV PR/SION PATTERN USING GRID PULSING TECHNIQUE" on Jun 19, 2025. With publication no. WO/2026/005380, the details related to the patent application was published on Jan 02, 2026.

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