INTERNATIONAL PATENT: PSK HOLDINGS INC., 피에스케이홀딩스 (주) FILES APPLICATION FOR "SUBSTRATE WARPAGE CONTROL APPARATUS BASED ON TORQUE OF CLAMP DRIVE UNIT, SUBSTRATE PROCESSING APPARATUS COMPRISING SAME AND SUBSTRATE WARPAGE CONTROL METHOD USING SAME"

GENEVA, Oct. 5 -- PSK HOLDINGS INC. (48, Samsung 1-ro 4-gilHwaseong-siGyeonggi-do 18449), 피에스케이홀딩스 (주) (경기도화성시삼성1로4길 48) filed a patent application (PCT/KR2025/002239) for "SUBSTRATE WARPAGE CONTROL APPARATUS BASED ON TORQUE OF CLAMP DRIVE UNIT, SUBSTRATE PROCESSING APPARATUS COMPRISING SAME, AND SUBSTRATE WARPAGE CONTROL METHOD USING SAME" on Feb 17, 2025. With publication no. WO/2025/206584, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intell...