GENEVA, Aug. 12 -- PRODUCT SYSTEMS INCORPORATED (1745 Dell AvenueCampbell, CA 95008) filed a patent application (PCT/US2025/013868) for "METHOD AND APPARATUS FOR CLEANING A WAFER EDGE AND BEVEL" on Jan 30, 2025. With publication no. WO/2025/166060, the details related to the patent application was published on Aug 07, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BECK, Mark J. (60 Ellenwood AvenueLos Gatos, CA 95030), LIEBSCHER, Eric G. (338 Oakberry WaySan Jose, CA 95123)

Abstract: A method and tool for cleaning the edge exclusion region of a semiconductor wafer, including the bevel re...