GENEVA, March 17 -- PICOSUN OY (Tietotie 302150 Espoo) filed a patent application (PCT/FI2024/050400) for "LOW VAPOR-PRESSURE PRECURSOR DOSAGE CONTROL" on Jul 26, 2024. With publication no. WO/2025/052028, the details related to the patent application was published on Mar 13, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BLOMBERG, Tom (c/o Picosun Oy, Masalantie 36502430 Masala)
Abstract:
A method and apparatus for controlling dosage of a low vapor-pressure reactant comprising a processing chamber (110) for processing substrates, an inert gas source system, a first inlet line (130) conn...