GENEVA, March 18 -- ONTO INNOVATION INC. (16 Jonspin RoadWilmington, Massachusetts 01887) filed a patent application (PCT/US2024/045349) for "INTERFEROMETER CONFIGURED TO MEASURE SMALL STRUCTURES" on Sep 05, 2024. With publication no. WO/2025/054298, the details related to the patent application was published on Mar 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SCHMIT, Joanna (16 Jonspin RoadWilmington, Massachusetts 01887), MUSTAFA, Haithem A. B. (16 Jonspin RoadWilmington, Massachusetts 01887)

Abstract: An interferometer is configured to characterize a plurality of structures in a...