GENEVA, March 9 -- NGK INSULATORS, LTD. (2-56 Suda-cho, Mizuho-ku, Nagoya-shi, Aichi4678530), 日本碍子株式会社 (愛知県名古屋市瑞穂区須田町２番５６号) filed a patent application (PCT/JP2023/032112) for "WAFER SUPPORTING PLATFORM AND RF ROD" on Sep 01, 2023. With publication no. WO/2025/046907, the details related to the patent application was published on Mar 06, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HARA Tomohiro (c/o NGK INSULA...