GENEVA, June 24 -- NANYANG TECHNOLOGICAL UNIVERSITY (50 Nanyang AvenueSingapore 639798) filed a patent application (PCT/SG2024/050783) for "A DEVICE FOR EXTREME ULTRAVIOLET GENERATION" on Dec 10, 2024. With publication no. WO/2025/128000, the details related to the patent application was published on Jun 19, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): DEMIR, Hilmi Volkan (c/o Nanyang Technological University, 50 Nanyang AvenueSingapore 639798), WONG, Liang Jie (c/o Nanyang Technological University, 50 Nanyang AvenueSingapore 639798)
Abstract:
Herein disclosed is a device operable to g...