GENEVA, May 5 -- MYCRONIC AB (Box 3141183 03 Taby) filed a patent application (PCT/EP2024/079669) for "SYSTEM AND METHOD FOR EVALUATING A SUBSTRATE PROCESSED BY OPTICAL MICROLITHOGRAPHY, SUCH AS A MASK OR A PHOTO MASK" on Oct 21, 2024. With publication no. WO/2025/087841, the details related to the patent application was published on May 01, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): WALTHER, Jonas (Nackrosvagen 26169 37 Solna)
Abstract:
An evaluation system is provided for evaluating a substrate. The evaluation system comprises at least one optical arrangement configured to have a f...