GENEVA, Nov. 10 -- MYCRONIC AB (Box 3141183 03 Taby) filed a patent application (PCT/EP2025/061146) for "QUALITY MONITORING IN MICROLITHOHRAPHY DEVICES" on Apr 24, 2025. With publication no. WO/2025/228765, the details related to the patent application was published on Nov 06, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): WALTHER, Jonas (Nackrosvagen 26169 37 Solna)
Abstract: A method for quality monitoring in microlithography devices comprises interacting (S10) with a two-dimensional pattern on a target by exposing the target for electromagnetic radiation. The exposing is performed using...